Gasonics AWD-D-2-3-002 Control Component

Gasonics AWD-D-2-3-002 Control Component

Product Details Introduction

product overview

This control component is used in Gasonics plasma processing systems to perform critical control and regulation functions. It connects subsystems such as microwave source, gas flow rate, vacuum pump, power management, etc., coordinates the overall operation of the equipment, and ensures that the processing flow is executed according to preset process parameters.

application area 

Control of microwave plasma equipment

Adjust microwave power and system operation status in cleaning, degumming, etching and other processes.

Aura series equipment core control system

Paired with Aura 2000, 3000, L3510 and other models, achieve process formula control and process management.

Core module of semiconductor production automation

By monitoring and providing feedback signals, closed-loop control of multiple parameters such as equipment temperature, pressure, flow rate, and power can be achieved.

Equipment maintenance and upgrading replacement parts

In the event of system failure or upgrade, this control component can be replaced to restore or enhance the reliability of the control function.

Technical advantages

Highly integrated: supports collaborative work of multiple subsystems and simplifies control architecture.

Precise craftsmanship: achieving precise control over key parameters such as microwave power, gas ratio, and vacuum degree.

Stable and reliable: equipped with redundant protection mechanism, suitable for continuous operation in production environments.

Convenient maintenance: Modular design, easy to replace and maintain quickly.

Product imag

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