Gasonics AWD-D-3-6-002 Magnetron waveguide

Gasonics AWD-D-3-6-002 Magnetron waveguide

Product Details Introduction

Product Name:

Gasonics AWD-D-3-6-002 Magnetron Waveguide Component

Product Overview:

This magnetron waveguide component is mainly used to efficiently transmit the microwave energy output by a microwave source (usually a magnetron) to the plasma processing chamber. It is a key component in the Gasonics Aura series plasma cleaning equipment, ensuring the stability and directionality of microwave power transmission.

Application areas:

Semiconductor Manufacturing

Used for plasma processes such as wafer cleaning, debonding, etching, etc

Compatible with Aura 3000/3010 series plasma cleaning equipment

Microwave plasma excitation system

The waveguide structure ensures accurate transmission of microwave energy, improves plasma density and uniformity

Equipment maintenance and upgrade

As a key replacement module to ensure equipment performance during long-term operation or aging of magnetic waveguides

Process consistency control

By stabilizing the microwave transmission path, ensure the repeatability of the process results

Product advantages:

Microwave transmission has high efficiency and low loss

Good compatibility with original equipment, easy to replace

Sturdy structure, suitable for cleanroom environments

Improve the overall operational stability and process accuracy of the equipment

Product imag

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