Gasonics 17305-01 engine

Gasonics 17305-01 engine

Product Details Introduction

Product Name:

Gasonics 17305-01 Microwave Power Generator

Product Overview:

Gasonics 17305-01 is a microwave power generation module used in plasma processing equipment such as the Aura 3000/3010 series. This device is mainly responsible for generating high-frequency microwave energy for exciting plasma, thereby achieving processes such as wafer cleaning and debonding.

Technical parameters (typical):

Power level: approximately 1250W to 2000W

Output frequency: Standard industrial microwave frequency band (usually 2.45 GHz)

Input voltage: 200-240V AC, single-phase or three-phase (depending on equipment configuration)

Interface type: microwave output interface+control signal port

Structural form: Modular design, compatible with Gasonics series host systems

Application areas:

Semiconductor plasma cleaning process (such as photoresist stripping)

Microwave power units in equipment such as Gasonics Aura 3000/3010

Plasma support system in process development laboratory and wafer manufacturing production line

Microelectronics MEMS、 Pre packaging processing related manufacturing equipment

Product advantages:

Stable output ensures plasma excitation quality

Highly compatible with original equipment

Support modular replacement and maintenance

Adapt to cleanroom and industrial grade operating environments

Product imag

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