Gasonics A93-021-04/C Magnetron Waveguides

Gasonics A93-021-04/C Magnetron Waveguides

Product Details Introduction

Product Overview:

Gasonics A93-021-04/C is a magnetron waveguide component used in semiconductor manufacturing equipment for magnetron microwave systems. This component is responsible for effectively transmitting and regulating the microwave energy generated by the magnetron, supporting the stable operation of plasma treatment processes.

Technical parameters (typical):

Type: Magnetron waveguide

Applicable equipment: Gasonics Aura 2000LL plasma cleaning equipment

Function: Transmit and regulate microwave energy

Structural form: Industrial grade metal waveguide tube, combined with magnetron and microwave emission system

Compatibility: Compatible with Gasonics Aura series related devices

Application scenarios:

Microwave energy transfer during plasma excitation process

Plasma processes such as semiconductor wafer cleaning and debonding

Equipment maintenance and replacement to ensure stable and reliable microwave transmission system

Cooperate with magnetron system to achieve efficient energy conversion

Product advantages:

Efficient microwave transmission reduces energy loss

Highly compatible with original equipment, easy to maintain and replace

Industrial design, adapted to harsh semiconductor process environments

Improve the stability and repeatability of plasma processing technology

Product imag

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