Gasonics 15132-01 Robot Wafer Mover

Gasonics 15132-01 Robot Wafer Mover

Product Details Introduction

Product Overview:

Gasonics 15132-01 is a robotic wafer mover used in semiconductor manufacturing equipment, belonging to the three-axis robotic arm (Z-Bot) type. It is mainly responsible for automatic wafer handling, achieving precise transfer of wafers between various workstations within the equipment, and improving the automation level and processing efficiency of the production line.

Technical parameters (typical):

Number of Motion Axes: Three Axes (X, Y, Z Direction)

Transport objects: semiconductor process materials such as wafers and carriers

Control mode: mechanical drive, coordinated with the main control system of the equipment to coordinate movement

Compatible equipment: Gasonics Aura series, L-3500, L-3510 and other semiconductor process equipment

Structural form: Industrial grade robotic arm, compliant with cleanroom usage standards

Application scenarios:

Automatic wafer handling and positioning

Wafer transfer in semiconductor cleaning, etching, deposition and other process flows

Accurate transfer of materials within automated production lines

Replace manual handling to improve production stability and efficiency

Product advantages:

High precision positioning and motion control

Compact structure, suitable for integration into various semiconductor devices

Adapt to cleanroom environment design

Can serve as important spare parts for equipment maintenance and upgrades

Product imag

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