Gasonics A94-060-01 Vacuum Arm Assembly

Gasonics A94-060-01 Vacuum Arm Assembly

Product Details Introduction

Product Overview:

Gasonics A94-060-01 is a vacuum robotic arm component used in semiconductor equipment, primarily for handling wafers or process carriers in vacuum or low-pressure environments. This component provides reliable handling support for automated processing equipment and is an important component of the internal wafer transfer system of the equipment.

Technical parameters (typical):

Component type: Vacuum robotic arm

Working environment: inside a vacuum or clean chamber

Control method: Move in conjunction with a motor or pneumatic drive system

Structural materials: Vacuum compatible metals and engineering plastics

Movement mode: horizontal straight line/rotation/lifting (depending on equipment configuration)

Installation location: Inside the equipment processing chamber or at the interface station

Function: Can be connected to end fixtures for wafer gripping and placement

Application scenarios:

Wafer handling

In the process of cleaning, peeling, etching, etc., the wafer is transferred from one chamber or stage to another workstation.

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As part of the automatic loading and unloading system, unmanned transportation is implemented to improve equipment operation efficiency.

Vacuum processing environment

Specially designed for operation in high cleanliness and low pressure environments, ensuring no particle release and reliable operation.

Gasonics plasma processing equipment

Paired with Aura, L3510 and other series of equipment, it is used for transferring materials inside the cavity.

Product advantages:

Precise control, stable movement, accurate positioning

Strong vacuum compatibility, meeting the requirements of semiconductor cleanliness

Strong replaceability, suitable for equipment maintenance and component replacement

Improve wafer processing efficiency and reduce manual intervention

Product imag

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