TEL Tokyo Electron 1381-648642-15 Control Motherboard Card

TEL Tokyo Electron 1381-648642-15 Control Motherboard Card

Product Details Introduction

Product Name: 1381-648642-15 Control Motherboard Card

Manufacturer: Tokyo Electron Ltd

Product type: Main Control Board Module

1、 Product Overview

1381-648642-15 is an important control motherboard card in Tokyo Electron semiconductor equipment, mainly responsible for the core control functions of the equipment, coordinating various subsystems of equipment operation, and achieving automation control and data processing.

2、 Main functions

Integrated microcontroller or processor, running device control programs

Manage input and output signals, complete sensor data acquisition and actuator control

Support communication with the upper control system to achieve process parameter configuration and status monitoring

Equipped with fault detection and alarm functions to improve equipment reliability

3、 Typical applications

Widely used in various semiconductor manufacturing equipment of Tokyo Electron, including but not limited to:

Etcher equipment

Thin film deposition equipment (CVD, PVD)

Coater/Developer

Wafer processing and transportation system

Product imag

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