TEL Tokyo Electron 5044-000387-11 Digital Control Board
Product Details Introduction
Product Name: 5044-000387-11 Digital Control Board
Manufacturer: Tokyo Electron Ltd
Product type: Digital I/O Control Board
1、 Product Overview
5044-000387-11 is a digital control board used in Tokyo Electron semiconductor manufacturing equipment, mainly for the acquisition, processing, and output control of digital signals. It is responsible for processing digital signals from various switches, sensors, and actuators of the equipment to complete the execution of automation control instructions.
2、 Main functions
Digital input acquisition
Collect on/off signals from sensors, buttons, limit switches, etc.
Digital output control
Control the switching actions of devices such as relays, solenoid valves, and indicator lights.
Signal isolation and protection
Built in isolation circuit and protective components ensure safe operation of the equipment.
communication interface
Communicate with the main control system through standard industrial buses or dedicated interfaces to transmit status and control information.
3、 Applicable equipment
This digital control board is widely used in the following Tokyo Electron devices:
Etcher equipment
Thin film deposition equipment (CVD/PVD)
Coater/Developer
Wafer handling and transportation system
Product imag

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