TEL Tokyo Electron EC08-000016-11 Control Motherboard Card

TEL Tokyo Electron EC08-000016-11 Control Motherboard Card

Product Details Introduction

Product Name: EC08-000016-11 Control Motherboard Card

Manufacturer: Tokyo Electron Ltd

Product Type: Main Control Board/Controller PCB

1、 Product Overview

EC08-000016-11 is one of the key main control boards in Tokyo Electron (TEL) semiconductor equipment, typically serving as the core control module of subsystems, integrating functions such as logic control, I/O management, and communication coordination. It is used to coordinate the operation of multiple executing components (such as valves, motors, sensors, etc.) and is an important component of equipment automation control.

2、 Main functions

Subsystem main control logic execution

Equipped with a microcontroller or FPGA, running device specific control programs to achieve closed-loop control of local action logic.

Centralized management of I/O signals

Collect digital/analog input signals (such as temperature, position, air pressure, etc.) and output control commands to drivers, relays, and actuators.

Communication interface management

Communicate with the upper control system or other modules (such as RS-232, CAN, Ethernet, TEL proprietary protocols, etc.) to coordinate the process flow.

Status monitoring and alarm feedback

Support real-time fault detection, LED status indication, and abnormal alarm feedback.

3、 Applicable equipment scope

The EC08-0000016-11 control motherboard is widely used in the submodule control of the following Tokyo Electron systems:

Coater/Developer

Thin film deposition system (CVD, PVD)

Etcher system

Vacuum/Gas Processing System

Mechanical action subsystems (such as wafer transfer arms, lifting platforms, etc.)

Product imag

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