TEL Tokyo Electron 1181-000393-18 Motor Unit Distribution Board
Product Details Introduction
Product Name: 1181-000393-18 Motor Unit Distribution Board
Manufacturer: Tokyo Electron Ltd
Product type: Motor Unit Distribution Board
1、 Product Overview
1181-000393-18 is a distributed circuit board specifically designed for motor control systems in Tokyo Electron semiconductor equipment. This board is mainly used to connect multiple motor units, complete functions such as power and signal distribution, isolation, and drive control, and play a role in centralized power supply and signal interface management.
2、 Core functions
Motor drive signal distribution
Distribute the control signals from the main control system to multiple servo motors or stepper motors to achieve precise motion control.
Power distribution and protection
Responsible for providing stable power supply to the motor and its control circuit, while also having overcurrent and overvoltage protection design to ensure system safety.
Centralized signal management
Summarize feedback signals from various motors (such as encoders, limit switches, position feedback, etc.) and send them to the main control board for processing.
Physical interface transfer
Provide standardized connectors (such as Molex, multi pin ribbon cables) for quick installation, maintenance, and replacement.
3、 Typical application devices
This motor unit distribution board is widely used in the transmission system of the following equipment in Tokyo Electron:
Wafer handling systems (such as Load Port, Aligner, Robot Arm)
Rotary table drive in Coater/Developer equipment
Mechanical positioning units for CVD, Etcher, Ashing systems
Wafer lifting platform, electric gate control, conveyor module, etc
Product imag

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ABB 3BHE046836R0101 GFD563A101控制器模块
| 6ES5948-3UR23 | 01-17423-003 | EXM-15A |
| 6ES5948-3UR11 | 6SC6100-0SA11 | 0660-01857 |
| 6ES5948-3UA12 | 6SC6103-0SE30 | C52711-022 |
| 6ES5945-7UA21 | 6SC6500-ONA04 | CE945GM2B-440 |
| 6ES5943-7UB21 | 6SC6110-0EA00 | exm-10a |
| 6ES5942-7UB11 | 6SC6114-5DA00 | 61-0654-22 |
| 6ES5930-8MD11 | 6SC6502-0AB02 | CE945GM2A-L24 |
| 6ES5928-3UA12 | 6SC6901-0VR05 | EPC21 |