TEL Tokyo Electron FPC-T0074A-11 Fan Control Board

TEL Tokyo Electron FPC-T0074A-11 Fan Control Board

Product Details Introduction

1、 Basic Information

Product model: FPC-T0074A-11

Product Name: Fan Power Controller/Fan Control PCB

Manufacturer: Tokyo Electron Ltd

Component category: Fan drive and monitoring circuit board

Applicable equipment: Cooling/Thermal Management Subsystem in TEL Semiconductor Equipment (such as CVD, Etcher, Ashing, etc.)

2、 Functional positioning

Fan operation control

Accurately control the start stop, speed adjustment, and operation logic of the cooling fan system to ensure that the internal temperature of the equipment is maintained within a safe range.

Fan power distribution

Convert the main power supply of the system to the low-voltage direct current required by the fan (such as 12V or 24V DC) and provide power protection.

Fault detection and alarm

Detect faults such as fan speed, operating status, and blockage, and provide feedback to the main control system to trigger alarms or protective actions.

System thermal management collaboration

Collaborate with temperature sensors and the main control system to dynamically adjust fan speed based on temperature (PWM control or analog adjustment).

3、 Application Fields

Equipment cooling subsystem

Used in CVD, PVD, dry cleaning (Ashing) and other equipment to control the operation of chamber fans, control board cooling fans, power fans, etc.

Closed control cabinet ventilation system

Control the cooling fans in enclosed spaces such as electrical control cabinets, RF modules, and power supply areas inside the control equipment.

Temperature critical component thermal protection system

Cooling ventilation control near heat exchangers, cooling modules, and air/vacuum components.

4、 Technical characteristics (typical)

Multi channel fan control output, supporting parallel or partitioned control of multiple fans

Supports PWM (Pulse Width Modulation) or voltage controlled wind speed

Real time speed feedback monitoring function (with Tach signal input)

Power protection function: overcurrent, overvoltage, short circuit protection

Onboard status indicator lights (such as fan running, fault, power supply status)

Industrial grade PCB design with high reliability and heat resistance

Product imag

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