TEL Tokyo Electron 3M80-001605-13 Input/Output Module

TEL Tokyo Electron 3M80-001605-13 Input/Output Module

Product Details Introduction

Product model: TEL Tokyo Electron 3M80-001605-13

Product Type: I/O Module

Functional positioning: Used in semiconductor manufacturing equipment to achieve signal transmission and control between equipment, sensors, and actuators

1、 Product Function Overview:

The 3M80-001605-13 input/output module is a key interface unit designed by Tokyo Electron (TEL), responsible for collecting digital and analog input signals from the equipment site, and outputting control signals to corresponding actuators such as valves, pumps, motors, etc., thereby achieving automatic control and status monitoring of process equipment.

2、 Main application areas:

Semiconductor equipment process control interface

Connect the main control system of the device with on-site sensors and actuators to achieve the collection of process parameters and the transmission of control instructions.

Multi channel signal acquisition and control

Supports multiple digital inputs/outputs and analog inputs/outputs, adapting to real-time monitoring and adjustment of complex process parameters.

Process automation process management

Assist the main control system in achieving automated process control, ensuring the stability of equipment operation and process consistency.

Equipment status monitoring and fault alarm

By monitoring the operating status of the equipment through input signals, timely feedback of abnormal signals is provided to support fault diagnosis and maintenance.

Modular control system support

As a key component of modular device architecture, it supports seamless integration with other control modules.

3、 Typical applicable equipment:

TEL Unity series plasma etching equipment

TEL Trias thin film deposition system

TEL Alpha series diffusion furnace

TEL Clean Track wafer processing and cleaning equipment

Product imag

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