TEL Tokyo Electron 381-639006-4 Input/Output Module

TEL Tokyo Electron 381-639006-4 Input/Output Module

Product Details Introduction

Product model: TEL Tokyo Electron 381-639006-4

Product type: Input/Output Module (I/O Module)

Functional positioning: realizing signal exchange and control between devices and external sensors and actuators

1、 Product Function Overview:

The 381-639006-4 input/output module is a key interface unit designed by Tokyo Electron (TEL) for semiconductor manufacturing equipment. It is responsible for collecting various input signals (digital and analog) from the equipment site, and outputting the processed control signals to actuators such as valves, pumps, motors, etc., to achieve automated control of the equipment process flow.

2、 Main application areas:

Semiconductor process equipment signal interface

Used for etching machines CVD、PVD、 The diffusion furnace, cleaning equipment, etc. are connected to the main control system of the equipment and the on-site sensors and actuators.

Digital and analog signal processing

Support multi-channel digital input (DI), digital output (DO), analog input (AI), and analog output (AO) to achieve process parameter acquisition and control.

Process automation control

Assist the main control processor in implementing valve control, pump regulation, motor drive, and process status monitoring to ensure process stability and accuracy.

Equipment status monitoring and alarm

By collecting input signals, real-time monitoring of equipment operation status and fault alarms can be achieved, improving equipment safety and reliability.

Modular system integration

As an important component of the device control architecture, it supports high-speed communication and data exchange with other modules.

3、 Typical applicable equipment:

TEL Unity series plasma etching equipment

TEL Trias thin film deposition system

TEL Alpha series diffusion furnace

TEL Clean Track wafer processing and cleaning equipment

Product imag

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