TEL Tokyo Electron 3181-06003-12 Circuit Board

TEL Tokyo Electron 3181-06003-12 Circuit Board

Product Details Introduction

Product model: TEL Tokyo Electron 3181-06003-12

Product type: Circuit Board

Functional positioning: Electronic control and signal processing module in semiconductor equipment

1、 Product Function Overview:

The 3181-06003-12 circuit board is a key electronic control unit designed by Tokyo Electron (TEL) for its semiconductor manufacturing equipment. This circuit board is used to process control signals and sensor data inside the equipment, support automated operation and process parameter adjustment of the equipment, and ensure efficient and stable operation of the equipment.

2、 Main application areas:

Semiconductor manufacturing equipment control system

Used for signal processing and control of equipment such as etching, deposition, diffusion, and cleaning.

Process parameter collection and execution

Process sensor signals such as temperature, pressure, and flow rate to achieve real-time monitoring and adjustment of process parameters.

Equipment subsystem signal connection

Implement electrical connections and signal transmission between various sub modules within the device.

Modular system integration

As part of modular device design, it supports the integration and coordination of multifunctional circuits.

Equipment maintenance and fault diagnosis

Support self diagnostic function to improve equipment operation reliability and maintenance efficiency.

3、 Typical applicable equipment:

TEL Trias series thin film deposition equipment

TEL Unity series etching equipment

TEL Alpha series diffusion furnace equipment

TEL Clean Track wafer processing and cleaning equipment

Product imag

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