TEL Tokyo Electron 1381-644-380-1 Sensor Board

TEL Tokyo Electron 1381-644-380-1 Sensor Board

Product Details Introduction

TEL Tokyo Electron 1381-644-380-1 Sensor Board * * is a high-precision signal acquisition module designed specifically for semiconductor manufacturing equipment, mainly used for real-time detection and feedback of key parameters of equipment operating environment or process status. This type of module is etched in TEL CVD、 Cleaning and other core equipment play a very important role in control and support.

1、 Basic Information

Product Name: Sensor Board/Sensor Module

Model: 1381-644-380-1

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: high-precision signal acquisition and processing board

Installation location: Embedded in TEL equipment control cabinet or connected to executing components (such as heaters, pumps, valves)

2、 Main functions

Collection of environmental and process parameters

Real time collection of process data such as temperature, pressure, gas flow rate, chamber vacuum degree, RF power, etc.

Signal conditioning and transmission

Amplify, filter, and level convert analog/digital signals, and transmit them to the main control system.

Process control feedback

Provide input for PID circuits and automatic adjustment logic to support precise process control.

Alarm linkage function

Overlimit or abnormal signals can trigger alarms, shutdowns, or safety interlock actions to ensure the safety of equipment and products.

3、 Typical application areas

This sensor board can be widely deployed in the following TEL device systems:

Etching Systems

Monitor the pressure, gas flow rate, plasma state, etc. inside the chamber.

CVD/ALD (Chemical Vapor Deposition System)

Detect heater temperature, reaction chamber pressure, and precursor delivery status.

Track Systems (photoresist processing equipment)

Used for monitoring developer concentration, temperature controlled water circuit, and baking area temperature.

Wet Clean/CMP (wet cleaning or chemical mechanical polishing)

Detect chemical liquid flow rate, pressure, pH value, or chamber liquid level, etc.

Product imag

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