TEL Tokyo Electron 381-642664-1 Analog Input Electronic Module

TEL Tokyo Electron 381-642664-1 Analog Input Electronic Module

Product Details Introduction

1、 Basic Information

Product model: 381-642664-1

Product Name: Analog Input Electronic Module

Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)

Module type: Analog signal acquisition input unit

Revision number: -1 (indicating the initial or first edition of this module)

2、 Main functions

This module is mainly used to collect analog signal inputs from field devices, providing high-precision parameter input data for the system for control, monitoring, and feedback.

Functional category description

Analog signal acquisition and reception of 0-10V, 4-20mA, RTD, thermocouple and other types of analog signals

Data conversion converts analog signals into system recognizable digital data (usually through ADC)

Real time monitoring of physical quantities such as temperature, pressure, flow rate, voltage, and current through process monitoring

Signal isolation has electrical isolation function to prevent noise interference and ground current from affecting system stability

Communication support enables data communication with the main controller (PLC, process computing unit) to achieve closed-loop control

3、 Typical application scenarios

This module is widely used in various precision measurement processes in TEL semiconductor equipment, with common applications including:

Photolithography pre-processing and post-processing system

Collect analog signals such as heating platform temperature, liquid flow rate, and environmental pressure

CVD/PVD thin film deposition equipment

Monitor heating chamber temperature, reaction gas flow rate, cooling system temperature difference, etc

Etching Equipment

Real time measurement of process parameters such as temperature, current, voltage, and gas density inside the cavity

Wafer handling system

Collect parameters such as pneumatic component pressure and motor feedback current to improve handling accuracy and safety

Product imag

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