TEL Tokyo Electron 1208-001196-11 Sensor Board

TEL Tokyo Electron 1208-001196-11 Sensor Board

Product Details Introduction

The TEL Tokyo Electron 1208-001196-11 Sensor Board is a key module in semiconductor equipment, used to collect and process signals from various sensors, achieve monitoring and control of equipment status and environmental parameters.

1、 Basic Product Information

Project Content

Model 1208-001196-11

Name: Sensor Board

Manufacturer Tokyo Electron Ltd. (TEL)

Function type: Multi sensor signal acquisition and conditioning module

2、 Core functions

Function category description

Multi channel sensor signal acquisition supports multiple sensor inputs such as temperature, pressure, humidity, etc

Signal conditioning and amplification amplify and filter the analog signals output by sensors

Signal conversion from analog to digital for easy processing by the main control system

Real time collection of environmental and device parameters for status monitoring, supporting alarm function

3、 Typical application areas

Application scenario description

Monitoring key process parameters such as temperature, pressure, and gas flow rate in wafer manufacturing equipment

Vacuum system collects signals from vacuum pressure sensors

Gas supply system monitors gas flow and valve status

The equipment safety interlock system monitors the status of safety sensors such as door switches and leak detection

4、 Technical features

Characteristic Description

High sensitivity, multi-channel input supports multiple types of sensor interfaces, collects multiple signals

Low noise amplification maintains signal accuracy and reduces environmental interference

Industrial grade design resistant to vibration and electromagnetic interference, suitable for clean room environments

Standard interface supports analog and digital signal output, compatible with multiple main control systems

Product imag

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