KLA Tencor 073-450886-00 Controller Module

KLA Tencor 073-450886-00 Controller Module

Product Details Introduction

1、 Product identification

Model: 073-450886-00

Also commonly referred to as: 710-450885-00

Name: PAT Light Controller Module

Application device: mainly used for KLA Tencor 5200 Overlay Inspection system

2、 Main functions

Light source control

Control the light source used in the pattern alignment detection process, adjust the light intensity and illumination mode.

Support pattern alignment

Provide stable lighting conditions to assist the system in accurately identifying alignment marks and testing patterns.

Feedback and Adjustment

Adjust the light source output based on detection feedback to ensure image clarity and detection accuracy.

3、 Application Fields

Used for pattern alignment detection of wafers or masks to ensure the accuracy of overlay inspection equipment.

Adapt to the parts of the KLA Tencor 5200 series detection equipment that have high requirements for light source control.

4、 Usage and maintenance suggestions

When purchasing, it is necessary to confirm the module status to ensure its normal operation.

When replacing modules, it is necessary to confirm compatibility with the firmware and hardware of the system.

It is recommended to have professional technicians operate during the maintenance process to avoid equipment malfunction caused by misoperation.

Product imag

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