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  • KLA Tencor 710-658177-20 processor module
  • KLA Tencor 710-658177-20 processor module
  • KLA Tencor 710-658177-20 processor module
KLA Tencor 710-658177-20 processor module KLA Tencor 710-658177-20 processor module KLA Tencor 710-658177-20 processor module

KLA Tencor 710-658177-20 processor module

KLA Tencor 710-658177-20 processor module

Product Details Introduction

KLA Tencor 710-658177-20 processor module

KLA Tencor 710-658177-20 is a processor control module used in wafer inspection systems, commonly found in surface defect detection equipment such as KLA Tencor's 2132/2135 series. It is mainly used to control the movement and synchronization of the X-axis in scanning systems and is one of the core components in the entire image acquisition and processing process.


Main functions:

Control the precise movement of the wafer platform in the X-axis direction;


Responsible for real-time position interpolation calculation and achieving sub micron level motion control;


Collaborate with the image acquisition system to ensure synchronous and stable detection process;


Execute core processing tasks related to motion control, position feedback, scanning timing, etc.


Application areas:

Wafer defect detection in semiconductor manufacturing;


Position control of optical and electron beam imaging systems;


The core control unit of high-precision scanning and detection platform;


The key motion control module in the KLA Tencor surface inspection system.


Product information:

Model: 710-658177-20


Type: X-Interpolator Phase 3 processor module


Installation location: located in the internal control area of the detection device host


Adaptation system: such as KLA Tencor 2132 series 200mm defect detection platform


Working mode: Coordinated operation with the main controller, encoder interface, and motion drive circuit

Product imag

kla_710-658177-20_x_interpolator_phase_3_pcb_073-658176-00_2132_working_spare_1.jpg

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