KLA Tencor 710-603180-003 Interface Board

KLA Tencor 710-603180-003 Interface Board

Product Details Introduction

KLA Tencor 710-603180-003 Interface Board

（Digital Deflection Generator Interface Board）

Product Introduction

KLA Tencor 710-603180-003 is a digital deflection generator interface board used in electron beam (e-beam) detection equipment. This board is one of the key components in the system, mainly used to provide accurate electrical signals for the deflection control system of the electron beam, in order to achieve high-resolution image acquisition and surface defect detection.

major function 

Control the precise movement of the electron beam on the wafer surface

Direct communication with the Digital Reflection Generator system for electron beam control

Support high-frequency and high-precision signal output to ensure detection accuracy

Optimizing the overall detection quality of collaborative image processing system

application area 

Wafer defect detection equipment

Quality Control System for Semiconductor Production Line

Precision scanning imaging system

Process evaluation and debugging platform for R&D laboratory

Technical Information (Overview)

Model/Part Number: 710-603180-003

Type: Interface Board Assembly

Manufacturer: KLA Tencor

Common equipment: Electron beam detection equipment applied to KLA, such as eS series or e-beam related systems

Product imag

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