KLA Tencor 720-06888-001 Focus Control Board Chassis

KLA Tencor 720-06888-001 Focus Control Board Chassis

Product Details Introduction

The KLA Tencor 720-06888-001 Focus Control Board Chassis is a key component used in the KLA Tencor CD-SEM (Critical Dimension Scanning Electron Microscope) series equipment, primarily for controlling and stabilizing the focusing system.

major function 

Focus control: used to adjust the focus of the electron beam, ensuring high-resolution and high-precision imaging and measurement on the wafer surface.

Module integration: This chassis integrates a focus control board, which works in conjunction with image processing, voltage regulation, and other modules to achieve dynamic optimization control of the electron beam.

application area 

Semiconductor Manufacturing

The critical dimension (CD) measurement and defect detection applied in wafer processing contribute to process control and yield improvement.

Research and Quality Control

Providing precise focus control and ensuring scanning imaging quality is an essential component of CD-SEM systems in process development and quality assessment.

Technical Information

Part number: 720-06888-001 (early versions were 720-06888-000)

Version information: commonly known as REV: A

Applicable models: commonly used in KLA Tencor 8100XP, 8100XPR, 8250 and other series CD-SEM equipment

Product imag

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PCD231B PCD231B101 3BHE025541R0101	6SC6108-0SG01	7LD21
PC844-XYZ-T	AMAT 0100-20416	HESG447271R0002 70BK03B-ES
PC844-XYZ-N	AMAT 0100-90659	PHARPS32010000
PC844-XYZ-F	AMAT 0100-91040	HESG447224R0002 70AB01C-ES
PC844-XYZ-A	AMAT 0100-00120	NTRO04
PC844-001-T	AMAT 0100-09034	PHARPS32000000
PC844-001-N	AMAT 0100-89004	NKAS01-15
PC844-001-F	AMAT 0100-35012	57120001-FG DSAO 30 ABB
PC844-001-A	AMAT 0100-35126	NKEB01