KLA Tencor 0390749-000 Safety Monitoring Board

KLA Tencor 0390749-000 Safety Monitoring Board

Product Details Introduction

The KLA Tencor 0390749-000 Safety Monitor Board is a critical safety assurance module in the KLA Tencor wafer inspection equipment, mainly used for real-time monitoring and protection of the nitrogen (N ₂) supply system inside the equipment, to prevent equipment failure or safety accidents caused by abnormal nitrogen supply.

Detailed functional description

Nitrogen system status monitoring

This safety monitoring board can continuously detect key parameters such as pressure and flow rate in the nitrogen supply system.

Real time judgment of whether gas supply is within normal range through sensor feedback data.

Ensure the safe and stable supply of nitrogen gas for dust prevention, explosion prevention, and environmental control throughout the entire testing equipment.

Abnormal detection and alarm mechanism

When the system detects insufficient air pressure, abnormal flow rate, or gas leakage, the onboard control logic will immediately trigger an alarm signal.

The alarm information will be sent to the main control system and alerted to the operator through the device's user interface.

By promptly alerting, potential operational risks of the equipment can be reduced and interruptions in the detection process can be avoided.

Automatic security protection function

When there is a serious abnormality or dangerous situation in the nitrogen supply, the safety monitoring board can automatically close the nitrogen supply valve.

Prevent equipment damage or safety hazards caused by gas supply issues.

Ensure the safety of operators and equipment.

System integration and communication

The safety monitoring board is designed to be tightly integrated with the KLA Tencor main control system.

Support digital or analog signal communication to ensure real-time transmission of safety status information.

It can achieve remote monitoring and fault diagnosis, facilitating equipment maintenance and management.

Industrial grade design standards

The board adopts industrial grade electronic components, which are resistant to high temperatures and electromagnetic interference, and can adapt to the harsh environment of semiconductor manufacturing.

Compact structure, easy to install in designated locations inside the equipment.

Support long-term stable operation and reduce maintenance frequency.

Application scenarios

Semiconductor wafer testing equipment

Mainly used in the nitrogen protection system of KLA Tencor's various wafer inspection systems to ensure a dust-free environment and explosion-proof requirements.

Cleanroom automation equipment

Implement safe gas management in production equipment that requires nitrogen protection.

Industrial Safety Monitoring System

Other related industrial automation equipment used for monitoring gas supply safety.

Product imag

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