KLA Tencor 710-663106-001 Single Axis Controller

KLA Tencor 710-663106-001 Single Axis Controller

Product Details Introduction

The KLA Tencor 710-663106-001 single axis controller is mainly used in high-precision motion control scenarios, especially in semiconductor manufacturing and testing equipment. The following are the main application areas of its products:

1. Semiconductor wafer inspection equipment

Used for scanning platform or optical probe control in KLA Tencor 21XX series (such as 2132, 2135, 2138, 2139, etc.) to achieve high-precision single axis movement.

2. Automatic Optical Inspection Equipment (AOI)

Control the single axis moving components (such as sample platform and microscope lens) in the image acquisition system to ensure the stability and positional accuracy of the motion during the detection process.

3. Precision motion control system

Can be used in scenarios that require single axis high-precision control, such as laser alignment systems, micrometer level focusing systems, etc.

4. Research and Material Analysis Platform

In experimental systems such as material analysis and surface defect research, it is used to drive a mobile platform to achieve uniaxial sample scanning.

Description of functional characteristics

Control one or two stepper motors

Support constant speed operation and acceleration/deceleration control

Communicate with the main control system through customized bus or ISA interface

Can achieve closed-loop position feedback control

Product imag

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