KLA Tencor 710-650204-20 driver board

KLA Tencor 710-650204-20 driver board

Product Details Introduction

The KLA Tencor 710-650204-20 driver board is a key module for precision motion control systems, mainly integrated into KLA Tencor's 2132 wafer defect detection equipment. This device is widely used in the field of semiconductor manufacturing to identify small defects on the surface and between layers of wafers.

Product application areas

Wafer Defect Inspection System

The driver board is responsible for controlling the Y-axis linear moving component, achieving precise positioning and smooth movement of the wafer on the inspection platform. This function is crucial for ensuring the accuracy of scanning imaging and defect recognition.

Image acquisition and scanning platform control

This module works in conjunction with the image acquisition system, driving a precision motor to move the wafer and achieve multi angle acquisition of high-resolution images. It is the fundamental link in image formation and analysis in the system.

Integration of automated detection system

In a complex automated inspection assembly line, this drive board serves as the core drive control unit of the subsystem, collaborating with other control boards (such as the focusing board and Z-axis control board) to complete system level synchronization operations.

High precision positioning control system

The drive board is equipped with a high-speed data processing unit and a precision feedback control mechanism, used to process real-time signals from displacement sensors or encoders, and supports micrometer level positioning control.

Production equipment maintenance and replacement of components

Modular design facilitates equipment maintenance and replacement, helps improve the maintainability of the entire system, reduce downtime, and enhance production efficiency.

FEATURES

Model: 710-650204-20

Type: Y-axis Flex Drive Control Board

Function: High precision motor drive, motion path control, system status feedback

Application equipment: KLA Tencor 2132 series 200mm wafer inspection machine

Interface: Typically integrated with standard servo drive communication protocols, supporting high-speed data link communication with the main control system

Product imag

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