KLA Tencor 720-06888-000 Focus Control Board Chassis

KLA Tencor 720-06888-000 Focus Control Board Chassis

Product Details Introduction

1、 Product Function Overview

KLA Tencor 720-06888-000 is a "focus control board chassis" specifically designed for CD-SEM (critical dimension scanning electron microscope) systems. Its core function is:

Provide a physical installation environment and power interface for installing the focus control circuit board;

Manage and stabilize the operation of the focusing system during the scanning process of the electron beam;

Support automatic focusing system to achieve high-resolution image acquisition;

Collaborate with the main control board and image processing board for real-time focus feedback and voltage control.

2、 Typical application areas

Semiconductor Manufacturing Equipment

Used in KLA Tencor CD-SEM series equipment, such as 8100XP, 8100XPR, 8250, etc;

Support critical processes such as wafer defect detection, image enhancement, and critical dimension measurement.

Process control and equipment maintenance

Integrated into the focusing subsystem, it plays a crucial role in the focusing stability during image acquisition;

Assist in achieving process window control and process consistency during research and production processes.

Equipment component replacement/maintenance

When there are problems such as deviation, defocusing, and focus drift in the focus system, the chassis and its internal boards are often used as repair/replacement objects.

3、 Related instructions

Part number: 720-06888-000 (sometimes also labeled as 720-06888-001 Rev. A)

System: Mainly equipped with CD-SEM series instruments

Common supporting boards: Focus control board, voltage regulation board, signal feedback unit

Usually internal OEM specific parts, obtained only through authorized channels or original factory technical support

Product imag

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