TEL 2L81-050009-14 controller card

TEL 2L81-050009-14 controller card 

Product Introduction

The TEL 2L81-050009-14 main control board is the core control unit of Tokyo Electronic Semiconductor Equipment, responsible for process logic scheduling, parameter acquisition, and multi submodule communication and coordination, suitable for cleanroom precision process scenarios. Its application areas are as follows:

1. Main control system of semiconductor etching equipment

2. CVD thin film deposition process equipment

3. ALD atomic layer deposition host

4. Wafer coating and development track equipment

5. Wet cleaning process control platform

6. Vacuum heat treatment process equipment

7. Wafer handling robot control system

8. Ion implantation supporting measurement and control unit

9. Semiconductor oxidation diffusion equipment

10. Wafer debonding and ashing equipment

11. Lithography supporting process control device

12. Semiconductor equipment automation testing bench

13. Linkage control of wafer inspection equipment

14. Special film material preparation equipment

15. Semiconductor production line MES docking control terminal

The TEL 2L81-050009-14 controller card has fast response speed and high process control accuracy, and can stably control key process parameters such as pressure, temperature, and gas flow under high cleanliness and strong vacuum conditions.

Product imag

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