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  • NIKON 4S015-084 Relay Control Card
  • NIKON 4S015-084 Relay Control Card
  • NIKON 4S015-084 Relay Control Card
NIKON 4S015-084 Relay Control Card NIKON 4S015-084 Relay Control Card NIKON 4S015-084 Relay Control Card

NIKON 4S015-084 Relay Control Card

NIKON 4S015-084 Relay Control Card 

Product Introduction

The NIKON 4S015-084 relay control card is a specialized relay board for Nikon lithography machines, responsible for controlling the on/off of machine circuits to ensure the stability of equipment timing and safety circuits

Product Features

Multi channel relay output realizes multi-channel circuit switch control

Real time feedback channel status signal for onboard bus monitoring

Compatible with Nikon lithography machine bus architecture for stable and reliable communication

Industrial precision board, resistant to clean workshop dust, operates for a long time

Equipped with overload protection to reduce the risk of damage to the board and circuit

Product application areas

Used in conjunction with Nikon semiconductor lithography equipment

Wafer lithography equipment safety circuit control unit

Vacuum valve on/off control of lithography machine

Photolithography cavity gas path solenoid valve control component

Control of switch signals for wafer transfer mechanism

Timing control of auxiliary circuit in exposure system

Lithography machine cabinet IO switch output unit

Signal control of semiconductor lithography process equipment

Precision optical semiconductor equipment circuit monitoring

Repair and replacement of spare parts for semiconductor lithography machines

Product Specifications

Compatible with Nikon NSR series lithography machines

Function: Multi channel relay switch output bus status monitoring

Applicable scenarios: Continuous production operations in semiconductor cleanrooms

NIKON 4S015-084 relay control card is a core switch control spare part for photolithography equipment, used for semiconductor machine maintenance and replacement

Product imag

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AMAT 0100-00259AMAT 0190-53913AMAT 0190-16739
AMAT 0100-00328AMAT 0190-54047AMAT 0190-16825


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