Pfeiffer vacuum 3870-07100 air assisted gate valve

Pfeiffer vacuum 3870-07100 air assisted gate valve

Product Introduction

Pfeiffer vacuum 3870-07100 air assisted gate valve

Product Features

Pneumatic air assisted valve opening and closing response is rapid and has high conductivity

Stainless steel valve body has excellent sealing performance and low leakage rate, meeting high vacuum working conditions

Integrated position feedback switch provides real-time feedback on the open and closed status of the valve

Compact valve body structure, direct installation of pipelines, occupying space, and layout of vacuum pipelines

Elastic seals are resistant to various process gases and compatible with semiconductor clean processes

Product application areas

Vacuum pipeline isolation for semiconductor etching equipment

Thin film deposition PVD CVD vacuum chamber

Wafer transfer airlock partition unit

On/off control of vacuum coating equipment pipeline

Laboratory ultra-high vacuum testing platform

Plasma cleaning equipment vacuum system

Optical component vacuum processing equipment

Vacuum leak detection system pipeline isolation device

Material surface modification vacuum equipment

Front end isolation valve of semiconductor vacuum pump group

Product Specifications

Drive Method: Compressed Air Pneumatic Auxiliary Drive

Valve body material: stainless steel main structure

Suitable for high vacuum working conditions with high vacuum level

Pfeiffer vacuum 3870-07100 air assisted gate valve, as a vacuum pipeline isolation component, is responsible for isolating the air path between the vacuum chamber and the pump unit to maintain the sealing and stability of the vacuum system

Product imag

ontroller Module

 DAI03 Analog quantity card
 DDI03 Input electronic module
 DSAI 110 57120001-DP DSAI110 Output electronic module

Other website links

 LTC743CE02 3BHE013299R0002智能型变压器控制器
HIMA F3 DIO 20/8 02数字输入/输出模块
EMERSON PR6426/000-010+CON021数字式输入输出模块