MKS 622B02TBE electronic capacitive pressure gauge

MKS 622B02TBE electronic capacitive pressure gauge

Product Introduction

MKS 622B02TBE electronic capacitive pressure gauge

Product Features

The measurement results are not affected by the type of gas, and the vacuum pressure detection accuracy is high

Nickel based alloy welding membrane is corrosion-resistant and suitable for various process gas environments

Fast response speed, real-time capture of pressure changes, small hysteresis, excellent repeatability

Equipped with anti overpressure protection structure, the sensing diaphragm is not easily damaged by pressure impact

Compact integrated structure vacuum chamber, easy to install and maintain

Product application areas

Semiconductor plasma etching equipment

Thin film deposition PVD CVD process chamber

Wafer debonding and ashing equipment

Vacuum coating production equipment

Laboratory vacuum testing platform

Biopharmaceutical freeze-drying equipment

Vacuum leak detection system

Vacuum processing equipment for optical components

Material surface modification treatment device

Analytical instrument vacuum pressure monitoring unit

Product Specifications

Range specification 2Torr full range measurement

Output signal 0 to 10 volts DC analog output

Power supply requirement:+/-15V DC power supply

The MKS 622B02TBE electronic capacitive pressure gauge belongs to the Baratron series vacuum pressure sensing equipment, which is used for high-precision absolute pressure monitoring in vacuum chambers to ensure stable and controllable pressure in semiconductor and vacuum processes.

Product imag

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