AMAT 0190-38992 Acquisition Module

AMAT 0190-38992 Acquisition Module

Product Introduction

The AMAT 0190-38992 acquisition module is a data acquisition unit that is used to collect process signals such as chamber pressure and temperature and upload them to the system in conjunction with semiconductor equipment.

Product Features:

1. High collection accuracy, real-time capture of weak process signals.

2. Board isolation design to resist electromagnetic interference from plasma chambers.

3. Original factory standard, can be directly adapted to AMAT wafer process equipment.

4. Equipped with signal over limit alarm for easy process monitoring.

5. Suitable for clean workshop conditions and capable of long-term continuous operation.

Application fields:

6. Process monitoring of semiconductor etching equipment.

7. Signal acquisition for PVD thin film deposition equipment.

8. CVD chemical vapor deposition equipment.

9. Monitoring of wafer processing chamber status.

10. Compound semiconductor manufacturing equipment.

11. MEMS micro nano processing equipment.

12. Semiconductor RF process supporting system.

13. Chip manufacturing production line data acquisition unit.

14. Replacement of spare parts for AMAT semiconductor equipment.

15. Precision plasma process monitoring equipment.

Product Parameters:

16. Module type: Multi channel analog signal acquisition module.

17. Adaptation: AMAT Centura series wafer equipment.

18. Support synchronous acquisition and transmission of multiple analog signals.

The AMAT 0190-38992 acquisition module collects real-time cavity process data and is an important monitoring spare part for semiconductor thin film and etching equipment

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