24411-0-1110000021 Gas Analyzer

24411-0-1110000021 Gas Analyzer

Product Introduction

24411-0-1110000021 is an online gas analyzer for semiconductor equipment, which monitors the changes in gas composition and concentration inside the process chamber in real time.

Product application areas

Endpoint detection of semiconductor plasma etching process

Monitoring of exhaust gas composition in thin film deposition equipment

Real time analysis of gas in wafer process chamber

Gas ratio verification in chip manufacturing process

Detection of trace gas concentration in vacuum equipment

Semiconductor sensors for gas sampling and monitoring

Monitoring of waste gas from wafer cleaning equipment

Replacement and maintenance of spare parts for semiconductor equipment

Gas control for microelectronic precision process equipment

Precision optical detection platform for gas monitoring

Product Features

Gas detection has fast response speed and high measurement accuracy

Corrosion resistant chamber structure, suitable for clean workshop conditions

Built in over limit alarm, real-time feedback of process abnormalities

Anti electromagnetic interference, suitable for long-term continuous monitoring

Integrated small structure, convenient for internal integration of equipment

Product Specifications

Support detection of multiple process gas components

Adapt to the internal DC power supply of the device

Equipment rack embedded installation specifications

This gas analyzer monitors the status of process gases in real-time, ensuring the stability of semiconductor processes. 24411-0-1110000021 is a core gas detection accessory for semiconductor process equipment.

Product imag

ontroller Module

NI PXI-2569 Relay module
NI PXI-8105 power card
 REF615HCF 2UBA001855R0510 Touch screen

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