Ebara PCCM1-5N TW80-000240-11 Controller

Ebara PCCM1-5N TW80-000240-11 Controller

Product Introduction

Ebara PCCM1-5N TW80-000240-11 is an Ebara Semiconductor Dry Pump PCU controller that controls the start stop, speed, and status monitoring of vacuum pumps, and is compatible with TEL semiconductor equipment.

Product Features

1. Closed loop control of pump body speed to maintain vacuum stability

2. Real time collection of operating parameters such as pump body temperature and current

3. Equipped with overload, overheating and other fault alarms and protections

4. Digital communication docking device host, remote monitoring parameters

5. Original board structure, suitable for long-term operation in clean workshops

Application Fields

1. Vacuum pump drive control for semiconductor etching equipment

2. Control of PVD/CVD thin film deposition vacuum unit

3. Supporting dry pump system for plasma cleaning equipment

4. Vacuum system control of wafer processing chamber

5. Replacement of maintenance spare parts for TEL matched Ebara vacuum pump

6. Vacuum coating equipment vacuum pump electronic control unit

7. Control of Material Plasma Processing Vacuum Unit

8. Pump body control of research vacuum experimental device

9. Panel process vacuum equipment matching

10. Renovation project for old semiconductor vacuum equipment

Ebara PCCM1-5N TW80-000240-11 controls the stable operation of vacuum pumps and is a commonly used control spare part for semiconductor vacuum equipment

Product imag

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