Seren 9600610000 RF power module

Seren 9600610000 RF power module

Product Introduction

Seren 9600610000 RF power module

This Seren 9600610000 RF power module belongs to the semiconductor plasma process RF generator, which outputs stable RF energy for thin film and etching processes

Product Features

Stable output power adapted to mainstream process frequency of 13.56MHz

Built in power closed-loop control reduces process fluctuations

Comes with multiple protections against overvoltage, overcurrent, and overheating

Support external communication for easy access to device control

Rack mounted structure suitable for clean workshop cabinet installation

Application Areas

Semiconductor dry etching equipment

Magnetron sputtering coating equipment

PECVD thin film deposition production line

Wafer plasma cleaning equipment

Compound semiconductor process equipment

Integrated Circuit Manufacturing Production Line

Plasma surface modification equipment

Replacement of spare parts for semiconductor equipment

Optical thin film preparation equipment

Plasma process research and development testing platform

Seren 9600610000 RF power module can be selected for various plasma process equipment to ensure stable output RF power and process consistency

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PC844-XYZ-N	6SC6130-0FE00	MC-PAOY22
PC844-XYZ-F	6SC6100-0GB11	MC-TAIH03
PC844-XYZ-A	6SC6100-0NA11	MC-TDIY22
PC844-001-T	6SC6110-3AA00	Honeywell
PC844-001-N	6SC6110-0EH02	MC-GAIH92
PC844-001-F	6SC6108-0SG02	MC-GAIH84