Edwards B75301000XS Turbomolecular Pump

Edwards B75301000XS Turbomolecular Pump

 Introduction

Edwards B75301000XS Turbomolecular Pump

Product Features

Fast pumping speed can quickly establish a high vacuum environment

Reduce particle pollution in the chamber with minimal vibration during operation

Real time monitoring of speed and temperature status

Equipped with overload protection and capable of stopping in case of abnormal conditions

The pump body has a compact structure, making it convenient for equipment installation

Application Areas

High vacuum acquisition of semiconductor etching chamber

PVD coating chamber vacuum maintenance

CVD process chamber gas extraction

Vacuum extraction of wafer load lock chamber

Replacement of spare parts for production line turbo molecular pump

Equipment renovation vacuum system matching

Experimental vacuum equipment for high vacuum acquisition

Vacuum maintenance of ion implantation equipment chamber

Vacuum coating equipment suction unit

Surface analysis instrument cavity extraction

The model of the turbo molecular pump used for high vacuum acquisition in semiconductor process chambers is Edwards B75301000XS

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