Seiko SCU-P027PRT3 Turbine Molecular Controller

Seiko SCU-P027PRT3 Turbine Molecular Controller

 Introduction

Seiko SCU-P027PRT3 Turbomolecular Pump Controller

Product Features

Precise control of pump speed to maintain stable chamber vacuum

Real time monitoring of abnormal pump body status and automatic alarm

Multiple circuit protection to prevent damage to the pump body

Support remote control through docking with the machine master controller

Intuitive panel operation, easy disassembly and maintenance

Application Areas

Semiconductor etching equipment driven by molecular pump

PVD coating chamber vacuum control

CVD process chamber molecular pump start stop monitoring

Wafer load lock vacuum unit control

Replacement of spare parts for the production line turbine controller

Equipment renovation vacuum system matching

Experimental vacuum equipment molecular pump control

Vacuum pump management for ion implantation equipment

Vacuum coating machine exhaust system control

High vacuum pump drive for analytical instruments

The model of this turbo molecular pump controller used for driving and controlling vacuum molecular pumps is Seiko SCU-P027PRT3

Product imag

ontroller Module

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