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NEWPORT XPS-Z840A Motion Controller

Product Features

Multi axis synchronous motion control can achieve high-precision positioning, smooth and stable trajectory

Ethernet high-speed communication interface supports remote programming and parameter setting on the upper computer

Built in trajectory planning and position triggering function to meet the requirements of precision detection synchronization

Integrated fault diagnosis and limit protection to avoid equipment damage caused by platform overtravel

Modular driver architecture compatible with multiple motor types, easy to debug and maintain

Application Areas

Precision displacement control of semiconductor wafer inspection platform

Optical measurement equipment carrier multi axis linkage drive

Motion control of sample stage for thin film measuring instruments

Precision positioning unit for chip packaging equipment

Replacement and maintenance of spare parts for semiconductor production line motion controllers

Refurbishment and renovation of chip equipment with accompanying motion control system

Research and development experiment precision optical platform displacement drive

Motion control of workpiece stage in laser processing equipment

Control of sample movement mechanism for probe testing bench

Precision stage position adjustment of vacuum coating equipment

The model of this motion controller used for precision multi axis displacement control is NEWPORT XPS-Z840A.

Product imag

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