VAT 65048-JH52-AGD1 gate valve motor

VAT 65048-JH52-AGD1 gate valve motor

 Introduction

VAT 65048-JH52-AGD1 gate valve motor

Product Features

Stepper motor drives precise and stable control of valve plate swing opening

Built in position feedback real-time feedback valve opening signal adaptation for vacuum pressure regulation

Low dust motion structure meets the requirements of semiconductor clean vacuum working conditions

Equipped with fault protection, power-off can maintain valve safety status

Standardized electrical interface adaptation machine control system with easy disassembly and assembly

Application Areas

Vacuum pressure regulation control of semiconductor etching chamber

PVD coating chamber vacuum pipeline throttling control

CVD process chamber vacuum isolation valve drive unit

Vacuum on-off control of wafer load lock chamber

Replacement and maintenance of spare parts for vacuum valves in semiconductor production lines

Refurbishment and renovation of chip equipment with vacuum execution components

Research and development of experimental vacuum equipment pressure control unit

Drive control of vacuum pipeline valve for ion implantation machine

Vacuum chamber pressure control of wafer cleaning equipment

Adjustment of high vacuum valve opening in optical coating equipment

The motor model for this gate valve used for pressure regulation in semiconductor vacuum chambers is VAT 65048-JH52-AGD1.

Product imag

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