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YASKAWA XU-DSCC0200-E servo drive

Product Features

High response position closed-loop control achieves smooth micro level positioning motion

Built in vibration suppression algorithm reduces machine operation jitter and protects wafers

Equipped with overload, overvoltage, and overheating alarm protection to ensure continuous operation of the machine

Supports high-speed bus communication for quick integration with semiconductor equipment control systems

The compact card structure is easy to disassemble and assemble, making it convenient for on-site replacement of spare parts

Application Areas

Motion Drive Control of Semiconductor Wafer Handling Robot

Wafer lifting platform servo power drive unit

Control of displacement mechanism for PVD coating equipment cavity

Plasma etching machine stage servo drive

Replacement and maintenance of servo spare parts for semiconductor production lines

Refurbishment and renovation of chip equipment with accompanying motion control

Research and development of precision displacement platform drive for experimental machines

Control of sample transfer mechanism for wafer testing equipment

Ion implantation equipment wafer box conveying servo control

Precision stage position adjustment of polishing equipment

The servo drive model for semiconductor precision motion control is YASKAWA XU-DSCC0200-E.

Product imag

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ontroller Module

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