AMAT 0190-15168 Energy RF Matcher

AMAT 0190-15168 Energy RF Matcher

 Introduction

AMAT 0190-15168 Energy RF Matcher, Navigator series 13.56MHz RF matching unit, suitable for application material machines, responsible for impedance matching between RF power supply and plasma chamber.

Product Features

1. Optimized for the 13.56MHz frequency band, the tuning response is straightforward under high-power conditions

2. Support high voltage and high current operation, able to withstand the instantaneous power impact of the etching chamber

3. Built in directional coupling sampling, real-time capture of forward and reflected power values

4. Quickly suppress reflected power during cavity ignition to protect the RF generator from damage

5. Water cooled cooling structure, capable of controlling temperature rise during long-term full load operation

6. The motor drives a variable capacitor, which can be tuned back and forth repeatedly to avoid jamming

7. Communicate and communicate with AMAT host, and send back matching status and fault codes at any time

8. The process formula can be saved, and switching between different processes does not require manually finding matching points again

9. The shielding of the shell can be done in place to reduce RF leakage and interference with surrounding sensors

10. The whole machine is reinforced with design, which ensures stable operation under vibration environment and low failure rate

Application Areas

1. AMAT Centura series plasma etching chamber

2. RF Circuit for Semiconductor PVD Thin Film Deposition

3. Wafer plasma debonding equipment

4. High density plasma dry etching system

5. High power 13.56MHz plasma process unit

AMAT 0190-15168 Energy RF Matcher is resistant to high-power impact and has sensitive ignition protection. It is the core matching spare part in the RF link of AMAT etching machine

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