TEL 2L80-001716-11 Heater Controller Box

TEL 2L80-001716-11 Heater Controller Box

 Introduction

TEL 2L80-001716-11 heater controller box, equipped with temperature control box for Tokyo Electronic Machine, specifically controls the process chamber heater and stabilizes the wafer process temperature.

Product Features

1. Accurate temperature control, minimal temperature fluctuations in the chamber, ensuring consistent processes

2. Comes with over temperature and wire breakage protection, promptly cuts off heating in case of abnormal temperature

3. Smooth communication with TEL host, real-time uploading of temperature data

4. Fast response speed, able to quickly adjust heating power

5. Anti electromagnetic interference, stable operation in complex workshop environments

6. Temperature resistant and earthquake resistant, suitable for long-term continuous operation of production lines

7. Integrated box design, easy cabinet installation

8. Equipped with fault self check, temperature faults can be easily and quickly located

9. Smooth power regulation, without sudden temperature rise or drop

10. The internal circuit has solid workmanship and a low failure rate after long-term use

Application Areas

TEL series CVD thin film deposition machine

2. Temperature control of semiconductor plasma process chamber

3. Wafer thin film growth process

4. Heating unit of semiconductor etching equipment

5. Vacuum process chamber temperature control system

The TEL 2L80-001716-11 heater controller box has stable temperature control and reliable protection, and is a key spare part for controlling chamber heating in TEL semiconductor equipment.

Product imag

ontroller Module

UR8GH Integrated protection device
UR8LH Integrated relay protector
UR9EV Integrated relay protector

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