Kawasaki 3NS004S-C019 wafer pre aligner

Kawasaki 3NS004S-C019 wafer pre aligner

 Introduction

Kawasaki 3NS004S-C019 wafer pre alignment device, Kawasaki Semiconductor EFEM front-end pre alignment component, uses CCD to identify wafer notches and locate wafer angles and centers in advance.

Product Features

1. High alignment accuracy, accurate positioning of wafer center and notch

2. Fast recognition speed, without slowing down the overall rhythm of the machine

3. Clean design, minimal particle generation during operation, protects the wafer

4. Equipped with CCD visual inspection, capable of identifying missing or skewed images

5. Smooth movement, gentle rotation, will not scratch the surface of the wafer

6. Anti workshop electromagnetic interference, stable long-term operation

7. Smooth communication and fast signal response with Kawasaki wafer robots

8. Compact size, easy to install inside the front-end module

9. Built in fault self check, easy to troubleshoot abnormal states

10. Durable mechanical components and low failure rate during continuous operation of the production line

Application Areas

1. Semiconductor EFEM front-end wafer transfer unit

Loading and unloading of 2.300mm wafer etching machine

3. Thin film deposition equipment wafer pre-processing station

4. Front end positioning module of wafer cleaning machine

5. Pre positioning of crystal circles on various semiconductor process machine platforms

Kawasaki 3NS004S-C019 wafer pre aligner has reliable positioning and good cleaning performance, and is a core spare part for the front-end transfer process of semiconductor machines.

Product imag

ontroller Module

UR6TH Integrated protection device
UR8GH Integrated protection device
UR8LH Integrated relay protector

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