Nihon Koshuha AMC-9501G01 RF Tuner Component
Introduction
Nihon Koshuha AMC-9501G01 RF tuner component, produced by Nippon High Frequency, paired with TEL semiconductor machine, responsible for automatic impedance matching.
Product Features
1. Fast automatic tuning speed, quickly completing matching when the cavity load changes
2. The reflected power is controlled very low, and the utilization efficiency of RF energy is high
3. Equipped with power monitoring, high reflection will trigger protection
4. Good matching accuracy ensures stable process results every time
5. Strong anti-interference ability, stable operation in dust-free workshop environment
6. Temperature and earthquake resistance, supporting long-term uninterrupted production of the machine platform
7. Support remote communication, the host can read the tuning status
8. Built in position memory, can quickly switch between different process parameters
9. Compact structure, easy disassembly and assembly of cabinets, and convenient maintenance
10. Durable internal components and low failure rate during continuous operation of the production line
Application Areas
TEL series CVD thin film deposition machine
2. Semiconductor plasma process chamber
3. Wafer film preparation process
4. Plasma surface treatment equipment
5. Microwave RF process supporting system
Nihon Koshuha AMC-9501G01 RF tuner component has fast tuning response and stable matching effect, making it a key RF matching spare part in TEL semiconductor equipment
Product imag

ontroller Module
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Other website links
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| PMB33E-20214-03 | IMCOM04 | 57160001-SH DSTD 306 |
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