PerkinElmer N6658603 Mass Spectrometer

PerkinElmer N6658603 Mass Spectrometer

 Introduction

PerkinElmer N6658603 Mass Spectrometer

Product Features

1. High detection sensitivity can capture trace gas components

Strong anti-interference ability, small baseline drift in vacuum environment

3. Fast analysis speed and real-time output of chamber gas data

4. Corrosion resistant structure adapted to corrosive gases in semiconductor processes

5. Simple maintenance, easy troubleshooting, and reduced downtime

Product Specifications

Installation of industrial standard power supply adaptation equipment cabinet

2 wide vacuum pressure detection range covering process conditions

3. Simultaneous identification of multiple components for rapid qualitative and quantitative analysis

4. Support communication output docking with the main control system of the machine

5 built-in vacuum sensing modules ensure stable detection

Application Areas

1. Residual gas monitoring of semiconductor cavity

Analysis of Leakage Detection in Process Chamber 2

Terminal judgment of 3 thin film deposition equipment

4 Vacuum process exhaust gas composition detection

5 Perkin Elmer Mass Spectrometry Equipment Spare Parts Replacement

This PerkinElmer N6658603 mass spectrometer is commonly used for semiconductor vacuum online gas monitoring and is a commonly used spare part for analytical instrument maintenance and replacement

Product imag

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