Comdel FP2849-04R1 RF Matching Network Module
Introduction
Comdel FP2849-04R1 RF Matching Network Module
Product Features
1. Impedance automatic adjustment quickly and efficiently completes RF power matching
2. Low power transmission loss, stable and uniform plasma ignition
3. Equipped with arc protection chamber to protect RF power supply during ignition
4. Good shielding performance to resist electromagnetic interference inside the cabinet
The modular structure is easy to disassemble and replace, saving time and effort
Product Specifications
1. Compatible with Comdel RF generator for power supply
2. Supports automatic impedance tuning of high-frequency RF signals
3. Water cooling, high power, long-term operation, stable temperature control
4 built-in sensors provide real-time feedback on matching status
5 standard cabinet installation dimensions are connected to the original RF circuit of the factory
Application Areas
1. RF impedance matching unit for semiconductor etching equipment
2 PECVD thin film deposition equipment RF matching module
3 RF matching components for vacuum plasma cleaning equipment
4. Power allocation of optical coating plasma process
5 Comdel RF power supply spare parts maintenance and replacement
This Comdel FP2849-04R1 RF matching network module is used in conjunction with the same brand RF power supply and is a commonly used spare part for semiconductor vacuum equipment maintenance
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