Inficon 923-713-G1 gas analyzer

Inficon 923-713-G1 gas analyzer 

 Introduction

Inficon 923-713-G1 gas analyzer

Product Features

1. High detection sensitivity to identify trace process gas components

Real time sampling analysis and rapid feedback of chamber gas changes

3 corrosion-resistant gases suitable for harsh semiconductor process environments

4 modular design, easy to disassemble and replace

5. Stable operation, long-term online monitoring, less likely to drift

Product Specifications

Installation of industrial standard power supply adaptation equipment cabinet

2 wide pressure detection intervals covering vacuum process conditions

3 built-in mass spectrometry detection units for multi-component gas recognition

4. Support communication output docking with device main control system

5 Small Bodies Save Internal Space in Cabinets

Application Areas

Monitoring of residual gas in semiconductor etching chamber

Gas detection in PECVD thin film deposition process

3. Determination of the endpoint of vacuum chamber cleaning

4. Leakage investigation and testing of process chambers

Replacement of spare parts for Inficon equipment analyzer

This Inficon 923-713-G1 gas analyzer is a commonly used monitoring spare part for semiconductor vacuum equipment, mainly used for cavity process monitoring, maintenance, and replacement

Product imag

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