VAT 64250-CE52-1101 High pressure and high vacuum gate valve

VAT 64250-CE52-1101 High pressure and high vacuum gate valve 

 Introduction

VAT 64250-CE52-1101 high-pressure high vacuum gate valve is a 64.2 series motor-driven vacuum regulating valve commonly used in semiconductor vacuum chambers.

Product Features

Stepper motor drive, precise gate positioning, and continuous adjustment of vacuum degree.

Excellent sealing performance, low leakage rate, and stable maintenance of high vacuum environment.

Stainless steel valve body, resistant to plasma corrosion, suitable for clean processes.

With position feedback, the machine can read the valve status in real time.

The switch response is stable, and the high-frequency cycle has a longer service life.

Product Specifications

Model 64250-CE52-1101, DN320 diameter.

The ultimate vacuum can reach negative 8th power mbar of 10.

The maximum pressure difference is 1.2 bar, and the valve body can withstand a maximum temperature of 150 degrees Celsius.

24V DC power supply, RS232 communication interface.

Molecular flow conductivity of 30000L/s.

Application Areas

Vacuum pressure regulation of semiconductor etching chamber.

High vacuum isolation control of thin film deposition equipment.

Replacement of spare parts for vacuum valves in old semiconductor machines.

Vacuum pipeline control of plasma cleaning equipment.

Research on pressure throttling of large vacuum chambers.

This gate valve can both shut off isolation and fine tune vacuum pressure, making it a crucial component in vacuum processes.

Product imag

ontroller Module

 07KT98 GJR5253100R427807KT98 H3 module
BENTLY 330100-90-00 Monitor module
BENTLY 330100-90-01 Monitor module

Other website links

DSAO120A模拟输出模块
BC810K01 以太网通讯
DSMB-02C 输入输出模块