VAT 65046-PA52-AIW2 swing gate valve

VAT 65046-PA52-AIW2 swing gate valve 

 Introduction

Most colleagues who maintain vacuum chambers are familiar with VAT 65046-PA52-AIW2 swing gate valves, also known as pendulum valves, which are core vacuum spare parts used downstream of semiconductor chambers to regulate vacuum pressure and isolate chambers.

Product Features

1. The valve plate swings smoothly and produces very little dust during the operation, which will not pollute the wafer process chamber

2. Equipped with stepper motor closed-loop control, precise valve position adjustment, and stable chamber pressure control

3. Fluororubber sealing structure, resistant to etching and corrosive gases, suitable for various semiconductor corrosion processes

4. Integrated driver controller, simple communication docking with the machine, time-saving and labor-saving disassembly and maintenance

5. The fully closed state is sealed reliably and can effectively isolate the chamber from the pump unit, preventing vacuum crosstalk

Product Specifications

1. Diameter DN200, ISO-F standard flange

2. The maximum vacuum can reach 1 × 10 ⁻⁸ mbar

3. Molecular conductance 12000L/s

4. Valve body material: hard anodized aluminum

5. Stepper motor drive, real-time feedback of valve position signal

Application Areas

1. Downstream pressure control of semiconductor wafer dry etching chamber

2. PVD thin film deposition equipment vacuum circuit voltage regulation isolation

3. Vacuum control of CVD chemical vapor deposition chamber

4. Vacuum system matching for plasma cleaning equipment

5. Maintenance and replacement of VAT swing valve spare parts for semiconductor vacuum equipment

Overall, the VAT 65046-PA52-AIW2 swing gate valve has high pressure regulation accuracy and good particle control, and is commonly used for vacuum control maintenance and replacement of corrosive process chambers.

Product imag

ontroller Module

1C31192G01 Digital output module
1C31197G05 Digital input module
1C31201G01 Analog input module

Other website links

Honeywell FC-IOCHAS-0002R 冗余I/O 机箱
GFD233A 3BHE022294R0103 励磁控制器模块
PFTL101A-2.0KN 3BSE004172R1 压力传感器