Shinko SBX92101286-4 Wafer Handling Robot

Shinko SBX92101286-4 Wafer Handling Robot 

 Introduction

Many colleagues who do front-end maintenance of semiconductor equipment have used the Shinko SBX92101286-4 wafer handling robot, which is an atmospheric wafer manipulator from Shin Kong. It is responsible for transferring wafers between FOUPs and process chambers and is the core moving component of EFEM units.

Product Features

1. High precision in repeated positioning, stable placement of wafers, and reduced risk of debris

2. Clean grade structural design, with minimal dust generation during operation, meeting the standards of a dust-free workshop

3. The servo drive operates with minimal vibration and does not shake the wafer during high-speed handling

4. Equipped with collision protection, it will immediately stop when encountering foreign objects, protecting the wafer and arm

5. Original matching interface, compatible with the machine control system, easy to repair and replace

Product Specifications

1. Compatible with wafer size 200mm

2. Multi axis linkage servo control, supporting composite actions of rotation, expansion, and contraction

3. The cleanliness level meets the requirements for dust-free semiconductor front-end

4. Built in position sensor, real-time feedback of arm coordinate status

5. Support communication with the device master, receive handling instructions and send back alarm information

Application Areas

1. Semiconductor EFEM equipment wafer loading and unloading transport

2. Chip feeding between FOUP wafer box and pre alignment table

3. Front end wafer handling of adhesive developing machine

4. Automatic wafer feeding process of wafer inspection equipment

5. Maintenance and replacement of spare parts for Shinko robotic arm

Overall, the Shinko SBX92101286-4 wafer handling robot runs stably and is safe and reliable for wafer retrieval. It is commonly used in the front-end transfer unit of 200mm wafer production lines.

Product imag

ontroller Module

1C31107G01 Digital output module
1C31147G01 Digital output module
1C31150G01 Digital quantity input module

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