TEL TMC2001-5G Temperature Controller

TEL TMC2001-5G Temperature Controller 

 Introduction

The TEL TMC2001-5G temperature controller is a temperature control unit that is compatible with the TEPCO etching machine and controls the temperature of the wafer stage

1. PID high-precision temperature control to maintain stable chamber temperature

2. Multi channel temperature acquisition, real-time monitoring of heating module

3. Automatic alarm protection for over temperature and sensor breakage

4. Support machine communication and receive main control set parameters

5. Board mounted installation, easy replacement and maintenance

1. Model TMC2001-5G, TEL original temperature control controller

2. Adapt to TEL dry etching machine crystal round table temperature control

3. Multiple temperature measurement signal inputs

4. Closed loop temperature regulation output

5. Fault status signal feedback

Applicable scenarios

1. Temperature control of TEL etching machine wafer stage

2. Temperature monitoring and adjustment of plasma chamber

3. Temperature control of semiconductor thin film process

4. Replacement of spare parts for Dongdian Semiconductor equipment

5. Control of vacuum process heating unit

Overall, TEL TMC2001-5G is a core temperature control spare part for etching machines, ensuring temperature consistency in wafer manufacturing processes

Product imag

ontroller Module

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