AMAT 0020-23027 Crystal Box Processor

AMAT 0020-23027 Crystal Box Processor 

 Introduction

AMAT 0020-23027 Crystal Round Box Processor is a FOUP processing component for EFEM end of application material machine

1. Smoothly complete the opening, closing, and positioning of the crystal box to prevent particle formation

2. Comes with box recognition function, reads barcode information of crystal round box

3. Low dust and clean design, adapted to the production requirements of dust-free workshops

4. Built in safety interlock to protect the wafer from damage in case of misoperation

5. Modular assembly, easy disassembly and maintenance, reducing downtime

1. Model 0020-23027, AMAT original crystal round box processing component

2. Compatible with 300mm wafer FOUP round box

3. Integrated mechanical positioning and recognition unit

4. Clean and low particle mechanical structure

5. Can communicate and link with the main control of the machine

Applicable scenarios

1. AMAT PVD Etching Machine EFEM Front end Module

Processing of 2.300mm wafer wafer loading round box

3. Wafer transfer unit box opening and closing mechanism

4. Front end material identification for semiconductor machines

5. Replacement and maintenance of spare parts for application materials and equipment

Overall, AMAT 0020-23027 is a core component for wafer loading front-end and a spare part for semiconductor production line maintenance

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